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Grade	Dimeter	Type/dopant	Orientaion	thickness	Resistivity	Flat	Surface/Roughness	Geometric parameter
Prime	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	400um+/-20 400um+/- 20 400um+/-20	0.0001 - 200 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	525um+/-20 625um+/-20 625um+/-20	0.0001 - 200 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	725um+/-20	0.0001 - 200 Ohm-cm /Customization	nothch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	775um+/-20	0.0001 - 200 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
Dummy	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	400um+/-20 400um+/- 20 400um+/-20	0.0001 - 200 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	525um+/-20 625um+/-20 625um+/-20	0.0001 - 200 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	725um+/-20	0.0001 - 200 Ohm-cm /Customization	nothch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	775um+/-20	0.0001 - 200 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
extra thick wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	>=1000um customization	0.0001 - 200 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	>=1000um customization	0.0001 - 200 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	>=1000um customization	0.0001 - 200 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	>=1000um customization	0.0001 - 200 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
extra thin wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	100um 200um customization	0.0001 - 200 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1000um 2000um customization	0.0001 - 200 Ohm-cm /Customization	16mm+/-2mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1000um 2000um customization	0.0001 - 200 Ohm-cm /Customization	16mm+/-2mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1000um 2000um customization	0.0001 - 200 Ohm-cm /Customization	16mm+/-2mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm
extra flat wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	400um+/-20 400um+/- 20 400um+/-20	0.0001 - 200 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	525um+/-20 625um+/-20 625um+/-20	0.0001 - 200 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm
200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	725um+/-20	0.0001 - 200 Ohm-cm /Customization	nothch/flat	polished/etched polished/polished	TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm
300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	775um+/-20	0.0001 - 200 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm

Prime

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

400um+/-20 400um+/- 20 400um+/-20

0.0001 - 200 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

525um+/-20 625um+/-20 625um+/-20

0.0001 - 200 Ohm-cm /Customization

32.5mm 42.5mm 57.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

725um+/-20

0.0001 - 200 Ohm-cm /Customization

nothch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

775um+/-20

0.0001 - 200 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

Dummy

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

400um+/-20 400um+/- 20 400um+/-20

0.0001 - 200 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

525um+/-20 625um+/-20 625um+/-20

0.0001 - 200 Ohm-cm /Customization

32.5mm 42.5mm 57.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

725um+/-20

0.0001 - 200 Ohm-cm /Customization

nothch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

775um+/-20

0.0001 - 200 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

extra thick wafer

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

>=1000um customization

0.0001 - 200 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

>=1000um customization

0.0001 - 200 Ohm-cm /Customization

32.5mm 42.5mm 57.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

>=1000um customization

0.0001 - 200 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

>=1000um customization

0.0001 - 200 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

extra thin wafer

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

100um 200um customization

0.0001 - 200 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1000um 2000um customization

0.0001 - 200 Ohm-cm /Customization

16mm+/-2mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1000um 2000um customization

0.0001 - 200 Ohm-cm /Customization

16mm+/-2mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1000um 2000um customization

0.0001 - 200 Ohm-cm /Customization

16mm+/-2mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um Ra<0.5nm

extra flat wafer

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

400um+/-20 400um+/- 20 400um+/-20

0.0001 - 200 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

525um+/-20 625um+/-20 625um+/-20

0.0001 - 200 Ohm-cm /Customization

32.5mm 42.5mm 57.5mm

polished/etched polished/polished

TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

725um+/-20

0.0001 - 200 Ohm-cm /Customization

nothch/flat

polished/etched polished/polished

TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

775um+/-20

0.0001 - 200 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 2um TIR <1um STIR < 1um BOW < 10um Warp < 10um Ra<0.5nm

CZ silicon wafers

WaferHome can manufacture the high purity 99.999999999% IC grade silicon wafer

Contact info

Specification for CZ Growth Siliocn Wafer